Infrared Laser Confocal Microscope
INFRARED LASER CONFOCAL MICROSCOPE
In response to the demands of semiconductor manufacturers for an instrument capable of imaging within a wafer or device in a non-destructive manner, WDI designed and manufactured an automated Infrared Laser Confocal Microscope (IRLC). The IRLC allows subsurface and interior inspection of silicon wafers and devices, permitting the imaging of internal structures at sub-micron resolution.
The IRLC features:
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Near-IR laser and IR optics coupled with confocal scanning technology ideal for non-destructive subsurface interior investigation of silicon wafers, IC chips, MEMS, Solar Panels, and other devices
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A full automation package consisting of a motorized XY stage, objective lens turret, illumination, focus and Z position and laser attenuation
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Powerful yet intuitive software, designed to increase the effectiveness and efficiency of the inspection and review processes
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Optional automation and recipe software, allowing the system to conduct completely automated inspection routines on individual devices or complete wafers and/or IC strip and tray packages
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